Product Index / Semiconductor related Equipment

The Implementation of Cleanliness, High throughput, Ease of maintenance

At semiconductor related production equipment, we manufacture and market the Load Port which transfer silicon wafer to each processing equipment, wafer transfer robots(Atmospheric type and vacuum type),and EFEM which integrated the Load Port and wafer transfer robots.

Semiconductor related Equipment (1'12）

Wafer Transfer System

EFEM(Equipment Front End Module）
Equipment transfer-ing wafers between the FOUP openers on the Load Port with high speed and cleanliness.

Wafer Sorter

Equipment transfer-ing wafers in EFEM with high speed and cleanliness.

Wafer Transfer Robot

	Atmospheric type AR-Wn series AR-Wn180CL Transfer robots achieving high speed transportation meeting lightweight and space efficiency.		Atmospheric type AR-Wn series AR-Wn180CL-5-TR-940 Transfer robots with enlarged Z stroke accomodating multi-stage chamber type equipments.

	Vacuum type AR-WV series Transfer robots accepting from low-vacuum environment to high-vacuum environment.

Load Port

	FOUP Opener KWF series Opener only for FOUP accepting 300mm wafer.		SMIF Pod Opener with arm KWO series SMIF Pod Opener loaded arm with tilt feature.

	SMIF Pod Opener （Manual operation） KWY series Manual opening and closing control SMIF Pod Opener.		SMIF Pod Opener (Automated operation) KWP series Automatic opening and closing control SMIF Pod Opener.

Wafer Positioning

Prealigner
KWA series
Wafer positioning device providing high quality alignment using non-contact(sensor-based)approach.

Edge Grip Prealigner
Wafer positioning device providing high quality alignment using Edge grip.

The Implementation of Cleanliness, High throughput, Ease of maintenance

Wafer Transfer System

Wafer Transfer Robot

Load Port

Wafer Positioning

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